type of service
Brief description
In which node(s)/ institutions(s) is available
Micro and Nano Device Fabrication
Micro and nanofabrication services on a MPW (multi project wafer) or on an individual process/run-sheet basis. Processes include film deposition, lithography, mask fabrication, CMP, Cu plating, anodic bonding, TMAH/KOH wire bonding, wafer dicing. Microfluidics on PDMS.
INL and INESC-MN
Spintronics
Design, optimization and production of customized magnetoresistive devices. Spin valve & Magnetic Tunnel Junction stack deposition & devices fabrication for sensing, spin transfer enabled devices. Integration on CMOS. CIPT testing. Magnetic Annealing Services. Micromagnetic simulation.
INL and INESC-MN
MEMS Laboratories
Thin film MEMS fabrication or bulk MEMS fabrication. MEMS design and full MEMS characterization including in plane and out of plane motion. Integration of MEMS with Spintronics.
Polyimide devices. Micro and nanoelectrodes for neuroscience applications. 3D needle arrays.
INL, INESC-MN and CMEMS-UMinho
Packaging Laboratories
CNC automated micro milling tools-resolution 25 um. Wafer dicing, wire and dye bonding including pick-and-place.
INL, INESC-MN and CMEMS-UMinho
IC Design
Mixed-Signal Analog and Digital IC Design, from design concept, schematic capture and simulation, verification and tape-out to fabrication targeting CMOS processes and production; PCB/system design; Test & Characterization development; Back-end process for integration of nano-devices on CMOS wafers.
INL and CMEMS-UMinho
Electron Microscopy Facilities
Nova NanoSEM, Quanta 650 ESEM, a Helios dual beam 450S FIB and a probe corrected Titan ChemiSTEM. The SEM facilities provide analysis of wafers (Nova NanoSEM), nanomaterials, soft samples and biological samples (Quanta ESEM).
INL
Structural, Surface and Interface Analysis
Structural characterization techniques include XAFS and thin-film X-ray diffraction, confocal Raman spectroscopy and microscopy, ATR-FTIR. Surface analysis techniques include XPS, STM, AFM, BioAFM, spectroscopic ellipsometry (including imaging and a high intensity CW laser source instrument).
INL and CMEMS-UMinho
Spectroscopy Laboratory
Spectroscopy laboratories incorporate UV-Vis spectrometers, spectrofluorimeters, a circular dichroism (CD) spectrometer, a time-of-flight fluorescence spectrometer (FLIM), and a microplate reader.
INL
Central Bio Laboratories
Cytometer; imaging laboratory; microbiology laboratory with level-2 biological laminar flow cabinets, bacterial CO2 incubators, 80ºC freezer; molecular-biology laboratory with real-time and end-point PCR, capillary electrophoresis bioanalyzer, nanodrop spectrofluorimeter, gel-imaging system.
INL
Central Nanochemistry Laboratories
The nanochemistry characterization laboratory includes an elemental analyser(C/H/N/S/O), gas chromatography, a gaz analyser/mass spectrometer, a TGA/DSC system, an automatic gas sorption analyser, and a plasma atomic emission spectrometer.
INL
Solar Dell Device Characterization Laboratory
A facility designed for solar cell device characterization includes an I-V tester equipped with a 3A class solar simulator, and a solar cell quantum efficiency measurement system.
INL
Magnetics Laboratories
Magnetic annealing systems (including a 400ºC, 2 T system for 200mm wafers), a 7 T SQUID magnetometer (1.5K to RT), and two vibrating sample magnetometers (RT to 600ºC). Several transport setups allow measurements of magnetoresistive devices in fields.
INL and INESC-MN
Biosensor and Microfluidic Laboratories
Microspotting tools, contact angle determination, inverted fluorescence microscopes, PDMS microfluidic processing, spintronic, thin film semiconductor, MEMS, CMOS, electrochemical sensor platforms.
INL, INESC-MN and CMEMS-UMinho
RF Characterization
Various spectrum and network analyzers (up to 80 GHz), pulse generators (10 pS rise time), RF sources, real time oscilloscopes ( 20 GHz), anechoic chamber.
INL, INESC-MN and CMEMS-UMinho
Energy Harvesting Laboratory
CMEMS-UMinho